| Code | Resolution | Maximum tool diameter (X axis) | Height measuring range | Accuracy of X axis | Accuracy of Z axis |
|---|---|---|---|---|---|
| TLP-P340B | 0.5μm | Ø300mm | 45~450mm | ±6μm | ±13μm |
| Code | Resolution | Maximum tool diameter (X axis) | Height measuring range | Accuracy of X axis | Accuracy of Z axis |
|---|---|---|---|---|---|
| TLP-P340B | 0.5μm | Ø300mm | 45~450mm | ±6μm | ±13μm |