| Code | Maximum tool diameter (X axis) | Maximum tool height (Z axis) | Repeatability of X axis | Repeatability of Z axis | X/Z axis resolution |
|---|---|---|---|---|---|
| ISP-A350 | 320mm | 350mm | 2µm | 2µm | 1µm |
| Code | Maximum tool diameter (X axis) | Maximum tool height (Z axis) | Repeatability of X axis | Repeatability of Z axis | X/Z axis resolution |
|---|---|---|---|---|---|
| ISP-A350 | 320mm | 350mm | 2µm | 2µm | 1µm |