| Code | Eyepiece | X/Y axis travel | Z axis travel | Accuracy of X/Y axis | Resolution of X/Y/Z axis |
|---|---|---|---|---|---|
| ISD-VMM205 | binocular | 150×100mm | 150mm | ≤(3.5+L/100)μm | 0.5μm |
| ISD-VMM215 | binocular | 200×100mm | 150mm | ≤(3.5+L/100)μm | 0.5μm |
| ISD-VMM225 | binocular | 250×150mm | 200mm | ≤(3.5+L/100)μm | 0.5μm |
| ISD-VMM235 | binocular | 300×200mm | 200mm | ≤(3.5+L/100)μm | 0.5μm |
| ISD-VMM205D | monocular | 150×100mm | 150mm | ≤(3.5+L/100)μm | 0.5μm |
| ISD-VMM215D | monocular | 200×100mm | 150mm | ≤(3.5+L/100)μm | 0.5μm |
| ISD-VMM225D | monocular | 250×150mm | 200mm | ≤(3.5+L/100)μm | 0.5μm |
| ISD-VMM235D | monocular | 300×200mm | 200mm | ≤(3.5+L/100)μm | 0.5μm |




