| Code | Range | Accuracy | Repeatability | Max. load |
|---|---|---|---|---|
| QMS-A110 | 98×78mm | ±3μm | ±1μm | 5kg |
| QMS-A200 | wide view field:148×108mm/ small view field:48×33mm | wide view field:±5μm/small view field:±2μm | wide view field:±1μm/small view field:±0.5μm | 5kg |
| Code | Range | Accuracy | Repeatability | Max. load |
|---|---|---|---|---|
| QMS-A110 | 98×78mm | ±3μm | ±1μm | 5kg |
| QMS-A200 | wide view field:148×108mm/ small view field:48×33mm | wide view field:±5μm/small view field:±2μm | wide view field:±1μm/small view field:±0.5μm | 5kg |