| Code | Accuracy | Probe length (L) | Protection stroke | Trigger force |
|---|---|---|---|---|
| 9410 | ≤1μm | 115.5mm | X-Y: ±12°, Z: +5mm | X and Y axis: 0.3-0.6N, Z axis: 4N |
| Code | Accuracy | Probe length (L) | Protection stroke | Trigger force |
|---|---|---|---|---|
| 9410 | ≤1μm | 115.5mm | X-Y: ±12°, Z: +5mm | X and Y axis: 0.3-0.6N, Z axis: 4N |