Surface Particle Counters
Code: 0813-SP Series
According to ISO 14644-1, ISO 14644-9
Widely used in the semiconductor, medical, pharmaceutical, electronics, food, chemical, and aerospace industries, etc.
Used to measure surface dust particles and airborne particles in clean rooms
7-inch LCD touchscreen control
Built-in flow sensor, automatic closed-loop flow control
Auto-evaluates purification level per preset standards
| Code | Particle channel | Sampling flow rate |
|---|---|---|
| 0813-SP01 | 0.1, 0.2, 0.3, 0.5, 1.0, 5.0µm | 28.3L/min (1ft³) |
| 0813-SP03 | 0.3, 0.5, 1.0, 3.0, 5.0, 10.0µm | 28.3L/min (1ft³) |
| 0813-SP05 | 5.0, 10.0, 25.0, 50.0, 100.0, 125.0µm | 28.3L/min (1ft³) |
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product specifications